An apparatus and method for producing a deflection of a Neutral Beam derived from a gas-cluster ion-beam deflects the gas-cluster ion-beam prior to dissociation of gas clusters and removal of tons.
申请公布号
EP2952070(A2)
申请公布日期
2015.12.09
申请号
EP20140745537
申请日期
2014.02.04
申请人
EXOGENESIS CORPORATION;KIRKPATRICK, SEAN, R.;CHAU, SON
