发明名称 半導体装置の製造方法
摘要 <p>PROBLEM TO BE SOLVED: To improve reliability of a semiconductor device in a manufacturing method of the semiconductor device.SOLUTION: A semiconductor device manufacturing method comprises: a process of arranging a second circuit base material 30 in which first through holes 30a and second through holes 30b are formed above a first circuit base material 20 including a plurality of electrodes 22 formed on a surface; a process of passing a plurality of first bumps 51 formed on a plurality of second electrodes 52 of a semiconductor component 50, respectively into the first through holes 30a and the second through holes 30b and contacting the plurality of first bumps 51 with the plurality of first electrodes 22; and a process of heating the first bumps 51 to melt to bond the first bumps 51 to the first electrodes 22.</p>
申请公布号 JP5831570(B2) 申请公布日期 2015.12.09
申请号 JP20140031543 申请日期 2014.02.21
申请人 富士通株式会社 发明人 水谷 大輔
分类号 H01L21/60;H05K3/34 主分类号 H01L21/60
代理机构 代理人
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