PHOTO-ALIGMENT PROCESSING DEVICE

摘要

The present invention relates to a photo-alignment processing apparatus (1) which aligns an alignment film by irradiating ultraviolet rays to the alignment film formed on a substrate (S). The photo-alignment processing device includes: a plurality of substrate supports (7) supporting the substrate; a running device running each of the supports along the same running route (RR); a UV irradiating device (9) irradiating ultraviolet rays to the substrate supported by the substrate supports running along the running route; and a withdrawing device (11) withdrawing the substrate supports from the running route for the running substrate supports not to collide with each other.