发明名称 |
Quad flat no-lead (QFN) packaging structure and method for manufacturing the same |
摘要 |
A quad flat no-lead (QFN) packaging structure. The QFN packaging structure includes a metal substrate, a first outer die pad formed on the metal substrate, and a first die coupled to a top surface of the first outer die pad. The QFN packaging structure also includes a plurality of I/O pads formed on the metal substrate, and a first metal layer containing a plurality of inner leads corresponding to the plurality of I/O pads and extending to proximity of the die. The first metal layer is formed on the metal substrate by a multi-layer electrical plating process such that a lead pitch of the plurality of inner leads is significantly reduced. Further, the QFN packaging structure includes metal wires connecting die and the plurality of inner leads, and a second metal layer formed on a back surface of the plurality of I/O pads and the die pad. |
申请公布号 |
US9209115(B2) |
申请公布日期 |
2015.12.08 |
申请号 |
US201414260303 |
申请日期 |
2014.04.24 |
申请人 |
Jiangsu Changjiang Electronics Technology Co., Ltd. |
发明人 |
Wang Xinchao;Liang Zhizhong |
分类号 |
H01L21/00;H01L23/495;H01L21/48;H01L21/56;H01L23/60;H01L23/00;H01L23/31 |
主分类号 |
H01L21/00 |
代理机构 |
Matthias Scholl, PC |
代理人 |
Matthias Scholl, PC ;Scholl Matthias |
主权项 |
1. A method for manufacturing a quad flat no-lead (QFN) packaging structure, the method comprising:
a) providing a metal substrate; b) forming a first photoresist film on a top surface of the metal substrate; c) forming a plating pattern in the first photoresist film using photolithography; d) forming a first metal layer containing a plurality of inner leads by a multi-layer electrical plating process using the plating pattern in the first photoresist film as a mask, such that a lead pitch of the plurality of inner leads is significantly reduced; e) attaching a die in a predetermined region on the top surface of the metal substrate; f) connecting the die and the plurality of inner leads using metal wires by a wire bonding process; g) sealing the die, the plurality of inner leads, and the metal wires with a molding compound; h) etching the metal substrate from a back surface of the metal substrate to form an outer die pad, corresponding to the predetermined area mounted with the die, and a plurality of I/O pads corresponding to the plurality of inner leads; and i) forming a second metal layer on a back surface of the plurality of I/O pads and the outer die pad. |
地址 |
Wuxi CN |