TAPE STICKING APPARATUS AND TAPE STICKING METHOD

摘要

A tape sticking apparatus for sticking a masking tape for protecting a peripheral portion of a substrate, such as a wafer, is disclosed. The tape sticking apparatus includes: a substrate holder (1) configured to hold and rotate a substrate (W); and a tape sticking unit (8) configured to stick a masking tape (7) onto a peripheral portion of the substrate (W) held on the substrate holder (1).