| 发明名称 |
EDGE CRACK DETECTION SYSTEM |
| 摘要 |
According to an exemplary embodiment, a method for detecting edge cracks in a die under test is provided. The method comprises the following operations: receiving a command signal; providing power from the command signal; providing a response signal based on the command signal; and self-destructing based on the command signal. |
| 申请公布号 |
KR20150136999(A) |
申请公布日期 |
2015.12.08 |
| 申请号 |
KR20150070257 |
申请日期 |
2015.05.20 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HSIAO HUANG TING;XU AN TAI;TSAO PEI HAW;TSAI CHENG HUNG;CHEN TSUI MEI;LU NAI CHENG |
| 分类号 |
H01L21/66;H01L21/78 |
主分类号 |
H01L21/66 |
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