Integrating functional and fluidic circuits in joule-thomson microcoolers

摘要

A method includes etching one or more fluidic channels into a first substrate made of a first material according to a first spatial pattern. The method also includes, after etching the fluidic channels, then separately etching a space in the first substrate according to a different second pattern that includes at least one connection between at least two different portions of the fluidic channels. The method still further includes depositing a different second material into the space. The method yet further includes bonding a different second substrate to the first substrate to enclose the fluidic channels to configure them to contain or pass one or more fluids. For fabricating a Joule-Thomson cooler, the first substrate is made of a first thermally insulating material; the second material is a thermally conducting material; and the second substrate is made of a second thermally insulating material.

主权项

1. A method comprising:
etching one or more fluidic channels having at least two different portions into a first substrate made of a first material according to a first spatial pattern; after etching the one or more fluidic channels, then separately etching a space in the first substrate according to a different second pattern that includes at least one connection between the at least two different portions of the one or more fluidic channels; depositing a different second material into the space; and bonding a different second substrate to the first substrate to enclose the one or more fluidic channels to configure the one or more fluidic channels to contain or pass one or more fluids.