Charged particle beam apparatus

摘要

Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.

主权项

1. A charged particle beam apparatus comprising:
a charged particle source which emits a charged particle beam; a charged particle optical system which focuses the charged particle beam and controls an optical axis; a lens barrel which holds the charged particle source and the charged particle optical system; a first housing which is connected to the lens barrel and into which the charged particle beam is emitted; a second housing which is recessed to inside the first housing from an opening of the first housing; a first diaphragm which is arranged on the optical axis and separates a space inside the lens barrel from a space inside the first housing, and through which the charged particle beam passes; and a second diaphragm which is arranged on the optical axis and separates spaces inside and outside a recessed section of the second housing from each other, and through which the charged particle beam passes, wherein a space surrounded by the first housing and the second housing is depressurized, and a sample arranged inside the recessed section of the second housing is irradiated with the charged particle beam.