Acoustic sensor

摘要

Provided are an acoustic sensor and a method of manufacturing the same. The acoustic sensor includes a substrate including an acoustic chamber, a first hole, and a second hole, penetrating the substrate, a lower electrode pad extended onto a top surface of the substrate while covering a sidewall of the first hole, a diaphragm pad extended onto the top surface of the substrate while covering a sidewall of the second hole, a lower electrode provided on the acoustic chamber and connected to the lower electrode pad, and a diaphragm above the lower electrode while being separated from the lower electrode and connected to the diaphragm pad.

主权项

1. An acoustic sensor comprising:
a substrate comprising an acoustic chamber, a first hole, and a second hole that penetrate the substrate, the first hole being spaced apart from the second hole; a lower electrode pad including a first portion and a second portion, the first portion disposed on a sidewall of the first hole, the second portion disposed on a top surface of the substrate and extending in a first direction; a diaphragm pad including a first portion and a second portion, the first portion disposed on a sidewall of the second hole, the second portion disposed on the top surface of the substrate and extending in a second direction; a lower electrode disposed over the acoustic chamber and connected to the second portion of the lower electrode pad; and a diaphragm disposed over the lower electrode and spaced apart from the lower electrode, the diaphragm being connected to the second portion of the diaphragm pad.