Apparatus for transferring substrates

摘要

The present invention relates to an apparatus for transferring a substrate. The apparatus includes a supporting member; an elevating and rotating member; a transferring unit; a first arm whose one end is supported by the elevating and rotating member to be rotatable; a second arm whose one end is supported by the transferring unit to be rotatable and whose the other end is supported by the other end of the first arm to be rotatable; and an arm driving part, installed on the first arm, which drives the other end of the second arm to pivot on the other end of the first arm to allow the first arm and the second arm to be folded or unfolded and thus removes the state of singularity by rotating the other end of the second arm based on the other end of the first arm.

主权项

1. An apparatus for transferring substrates, comprising:
a supporting member; an elevating and rotating member installed to be elevated or descended and rotated on the upper side of the supporting member; a transferring unit, which is installed on the elevating and rotating member, for making linear motions to transfer substrates when the elevating and rotating member moves; a first arm with a first end supported by the elevating and rotating member to be rotatable; a second arm with a first end supported by the transferring unit to be rotatable and with a second end connected at an elbow joint with a second end of the first arm to be rotatable, wherein said elbow joint is formed by a driving shaft connecting the second arm with the first arm, said elbow joint pivoting about said driving shaft, and wherein said second arm is bent; an arm driving part including a motor connected to the driving shaft for first introducing driving movement to the first and second arm at the driving shaft to cause pivoting of the elbow joint to allow the first arm and the second arm to be folded or unfolded and thus removes the state of singularity by rotating the second end of the second arm based on the second end of the first arm to allow the second arm to be unfolded with the first arm when a virtual linear line connecting both ends of the first arm and another virtual line connecting both ends of the second aim are arranged at an overlapped state while the first arm and the second arm move.