发明名称 Electrodeposition of thin-film cells containing non-toxic elements
摘要 A structure and method of making a thin-film solar cell is provided. A thin-film solar cell includes a substrate, absorber layer and a buffer layer. The absorber layer is deposited by a single-step bulk electrochemical process, or a multi-layer electrochemical process. The buffer layer is deposited by an electrochemical deposition process such as a multi-layer deposition or an atomic layer deposition. The absorber and buffer layers are non-toxic materials which can include sulfur incorporated during the deposition process or incorporated after deposition by an anneal step.
申请公布号 US9209343(B2) 申请公布日期 2015.12.08
申请号 US201514699396 申请日期 2015.04.29
申请人 International Business Machines Corporation 发明人 Deligianni Hariklia;Guo Lian;Vaidyanathan Raman
分类号 H01L31/18 主分类号 H01L31/18
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP ;Alexanian Vazken
主权项 1. A method of manufacturing a thin-film cell, the method comprising: providing a substrate; depositing an absorber layer onto the substrate; and depositing a buffer layer onto the absorber layer, wherein the absorber layer and the buffer layer are made from non-toxic materials; wherein the depositing the absorber layer and the buffer layer is performed using an electrochemical atomic layer deposition process carried out under illumination so as to excite electrons from a valence band to a conduction band, wherein the electrons at an edge of the conduction band at a solid/liquid interface are energetically higher than that of a redox potential of S2O32−/ZnS; and wherein the electrochemical deposition process for depositing the buffer layer is carried out by: filling a cell with an indium solution comprising: 1 mM to 500 Mm InSO4; 0.1 M to 1M NaClO4; and 10 mM to 1000 mM C2H3NaO2; adjusting a pH of the indium solution to about 1 to about 5; exposing the absorber layer to a light source; applying a voltage to the substrate located in the cell of about −0.1 V to −1 V with reference to a Ag/AgCl reference electrode for about 1 to 100 seconds; rinsing the cell for about 1 to 100 seconds using a rinse solution with a pH of about 1 to about 5 and comprising 0.1 M to 1 M sodium perchlorate and 10 mM to 1000 mM sodium acetate, wherein the voltage of −0.1 V to −1 V is maintained; filling the cell with a selenium solution comprising: 0.1 mM to 500 mM SeO2; 0.1 M to 1 M NaClO4; and 10 mM to 1000 mM C2H3NaO2; adjusting a pH of the selenium solution to about 1 to 12; exposing the absorber layer to a light source; applying a voltage to the substrate located in the cell of about +0.10 V to about −1.4 V with reference to the Ag/AgCl reference electrode for about 1 second to about 100 seconds; rinsing the cell for about 1 second to about 1000 seconds using the rinse solution, wherein the voltage of −0.1 V to about −1 V is maintained; and repeating the above steps for about 1 to 2000 cycles, wherein for each cycle the voltage applied to the electrode is increased by about −0.001 V up to a voltage of about −1 V, thereby producing a thin-film of In2Se3.
地址 Armonk NY US