| 摘要 |
The present invention relates to a substrate transfer device and, more specifically, to an edge grip type substrate transfer device for being used in a vacuum environment. The substrate transfer device according to an embodiment of the present invention is a device for transferring a substrate in a vacuum environment, comprising: a body part; an arm part combined with the body part and moving to transfer the substrate; an accommodation part connected to the arm part and accommodating the substrate; a drive part for driving the substrate accommodated in the accommodation part to be fixated or released; a control part for controlling the operation of the substrate transfer device; and a wireless control part for receiving a command relating to operation from the control part and wirelessly transmitting the command to the drive part. |
