Method for manufacturing organic EL element, organic EL element, organic EL display panel, organic EL display apparatus, and organic EL light-emitting apparatus

摘要

Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.

主权项

1. A method for manufacturing an organic EL element, the method comprising:
reducing an internal pressure of a vacuum chamber by a vacuum pump connected thereto in a state where a substrate with an applied film formed thereon is placed in the vacuum chamber, the applied film having been formed by applying a material of an organic light-emitting layer to the substrate; and purifying the applied film having passed through the reducing the internal pressure of the vacuum chamber, wherein diphenylamine is used in a portion of the vacuum pump that is connected to an inside of the vacuum chamber, the reducing the internal pressure of the vacuum chamber is performed such that molecules of diphenylamine fly from the vacuum pump into the vacuum chamber and some of the molecules are taken into the applied film, and the purifying is performed so that content of diphenylamine in the applied film is in a range from more than 0 nmol/cm3 to 13.8 nmol/cm3.