| 摘要 |
The present invention, in an electrostatic chuck, aims to prevent an occurrence of discharge inside. To achieve the purpose, the present invention provides an electrostatic chuck which comprises: a base plate (10) having a penetrating hole (12); a protruding unit (P) protruding from the top end of the penetrating hole (12); a tank-shaped insulating part (20) inserted into the penetrating hole (12); a device (40) placed on the base plate (10); a recess unit (D) formed on the bottom surface of the device (40) with the protruding unit (P) of the tank-shaped insulating part (20) inserted; a concave unit (C) formed on the recess unit (D) of the device (40); an electrode (E) formed on the concave unit (C) of the device (40); and, a feeding terminal (T) placed in the tank-shaped insulating part (20) and connected to the electrode (E). |
