发明名称 IONIZATION RADIATION CURABLE PROTECTIVE LIQUID AND PHOTOMASK
摘要 PROBLEM TO BE SOLVED: To provide an ionization radiation curable protective liquid enabling a protective film excellent in releasability, cleaning durability and adhesiveness to be formed in a short period of time.SOLUTION: There is provided the ionization radiation curable protective liquid which has a (meth)acrylate component, a thermoplastic resin and a fluorine compound and in which the content of the thermoplastic resin is preferably 3 to 20 wt.% of a solid content of all resin binder content. Thermoplastic acrylate or acryl polyol may be used as the thermoplastic resin. A percentage content of the fluorine compound in the protective liquid preferably may be 1 to 20 wt.% based on the solid content of the all resin binder. A perfluoroacrylate compound containing a (meth)acryloyl group, a perfluoropolyether compound may be used as the fluorine compound. (Meth)acrylate oligomer and/or (meth)acrylate monomer may be used as the (meth)acrylate component.
申请公布号 JP2015219373(A) 申请公布日期 2015.12.07
申请号 JP20140102880 申请日期 2014.05.16
申请人 KIMOTO CO LTD 发明人 FUNABASHI YOHEI;NEGISHI TOMOKO;NAKAMURA KAORU;KURISHIMA SUSUMU;HIRAMATSU HIROSHI
分类号 G03F1/48;C08F299/06;H01L21/027 主分类号 G03F1/48
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