| 摘要 |
The present invention relates to a process temperature control apparatus to maintain and change a process temperature in an electrostatic chuck (10) into a first temperature of a low temperature and a second temperature of a high temperature. The process temperature control apparatus includes: a storage tank (110) for storing a refrigerant circulating in the electrostatic chuck; a heater unit (150) for heating the refrigerant supplied from the storage tank (110); a thermoelectric unit (170) for cooling the refrigerant supplied from the storage tank (110); a pump (130) for circulating the refrigerant of the storage tank (110) in order for the refrigerant to be flowed into the electrostatic chuck (10) via the heater unit (150) and the thermoelectric unit (170); a three-way valve (160) which is installed at a front end of the heater unit (150) and the thermoelectric unit (170), and supplies the refrigerant to the heater unit (150) or the thermoelectric unit (170) by controlling a flux of the refrigerant; and a controller which controls an output of the heater unit (150) and the thermoelectric unit (170), and controls the amount of opening of the three-way valve (160) also, and adjusts the temperature of the refrigerant flowed into the electrostatic chuck (10) via the heater unit (150) and the thermoelectric unit (170). |
