| 摘要 |
PROBLEM TO BE SOLVED: To transfer a fine pattern inexpensively in excellent throughput.SOLUTION: A hollow tunnel passing the mold outside is connected to a fine pattern of a conventional mold for nanoimprint, and gas or a mold release agent is sent directly to the fine pattern engraved on the mold, and pressure or temperature control to a resin in the fine pattern engraved on the mold is performed, and further the mold release agent is applied into the fine pattern of the mold in each release of the resin. |
