| 摘要 |
PROBLEM TO BE SOLVED: To improve a response speed in the suction air temperature detection unit of a flow rate measurement device.SOLUTION: A flow rate measurement device 1 is configured primarily by a main body unit 1a and a measurement channel composition unit 1b. A detection element unit 3 is disposed on the inner surface side of a plate 8 that is a wall surface part constituting a measurement channel 4 of the measurement channel composition unit 1b, and a suction air temperature detection unit 6 for detecting the temperature of a fluid to be measured is formed on one principal surface of a circuit board 15 constituting the detection element unit 3. A vent hole 34 for letting a main channel 2 and the measurement channel 4 communicate with each other is provided so as to penetrate the plate 8 of the measurement channel composition unit 1b. An end part of the circuit board 15 that constitutes the detection element unit 3 is disposed in the vent hole 34 so as to protrude, and the underside of the end part of the detection element unit 3 on which the suction air temperature detection unit 6 is formed is exposed to the main channel 2 side. |
