FLUID CONCENTRATION/VAPORIZATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a fluid concentration/vaporization device needing no conveyance of high-concentration hydrogen peroxide solution, with low adverse effect on electronic apparatuses and capable of downsizing.SOLUTION: A fluid concentration/vaporization device comprises: a vaporization chamber in which the inflow and outflow ports are comprised and the aqueous solution of high-boiling point liquid having a standard boiling point higher than 100°C is housed; a flow rate controller controlling the flow rate of the vapor flowing out of the outflow port; a heater heating the prescribed places of the vaporization chamber and the flow rate controller; a discharge flow channel through which the vapor flow-controlled in the flow rate controller is discharged; a drain flow channel branched from the discharge flow channel; a switching valve switching the discharge flow channel and the drain flow channel; and a controller switching the switching valve from the drain flow channel to the discharge flow channel when the concentration of the high-boiling point liquid in the aqueous solution in the vaporization chamber is a prescribed estimated level or higher.