| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which effectively cleans a cleaned object.SOLUTION: A cleaning device 1 cleans a cleaned object W in a cleaning area and includes: a base 5 which rotates the cleaned object W in a horizontal direction; a rotary mechanism 4 which rotates the cleaned object W in a tilt manner; a support 3 which supports the cleaned object W; a movable chamber 2 which covers the cleaned object W and swings in a vertical direction; low pressure cleaning nozzles 6 which are disposed in the movable chamber 2 and inject a fluid to the cleaning area; high pressure cleaning nozzles 7; and supply ports 9 which are disposed in the movable chamber 2 and supply a liquid to the cleaning area. A periphery of the support 3 does not contact with an inner wall of the movable chamber 2. |
