SUPERHEATED STEAM PROCESSING METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a superheated steam processing method and a device of the same in which an oxygen amount existing in water supplied to a steam generator is reduced, and which has a preferable oxidation prevention characteristic, in superheated steam processing of a material which requires high-degree oxidation prevention.SOLUTION: In a superheated steam processing method in which steam generated in a steam generator 104 is heated in a superheating heat source, it is fed into a processing chamber 102 and processing is performed, oxygen dissolved in water 132 before being fed into the steam generator is replaced with a replacement gas in advance.