POLISHING TABLE EXCHANGING APPARATUS, AND POLISHING TABLE EXCHANGING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polishing table exchanging apparatus capable of exchanging a large polishing table in a small maintenance space.SOLUTION: A polishing table exchanging apparatus 10 is one for extracting a polishing table 3 from a polishing device 1. This polishing table exchanging apparatus 10 comprises: a crane 12 for moving the polishing table 3 in a vertical direction and in a horizontal direction; a table base 14 for placing said polishing table 3 thereon; and a table base inclining mechanism 15 for inclining said table base 14 with respect to the horizontal direction.