| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device which is advantageous from the viewpoint of productivity.SOLUTION: An exposure device has a first detector for detecting the shape of a substrate, a first positioning unit for positioning the substrate on the basis of a detection result of the first detector, a second detector for detecting a mark formed on the substrate positioned by the first positioning unit, a second positioning unit for positioning the substrate positioned by the first positioning unit on the basis of a detection result of the second detector, and a controller for controlling the second positioning unit. When the detection result of the first detector is within a predetermined range, the controller controls the second positioning unit to position the substrate on the basis of a result of detection of the mark in a first field of view by the second detector. When a foreign matter adheres to the substrate and thus the detection result of the first detector is not in the predetermined range, the controller controls the second positioning unit to position the substrate on the basis of a result of detection of the mark detected by the second detector in a second field of view broader than the first field of view. |
