| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical inspection device that can maintain inspection accuracy with a front and a rear separated even when an inspection object substrate is thinned.SOLUTION: A substrate inspection device 1 comprises a substrate holding unit 2, an illumination unit 3, an imaging unit 4 and an inspection unit. The illumination unit is arranged so as to irradiate a first surface of a substrate W with illumination light at a prescribed angle, and the imaging unit comprises: a substrate first surface side imaging unit that observes a first surface side inspection object area set on the first surface side of the substrate from the first surface side; and a substrate second surface side imaging unit that photographs a second surface side inspection object area set on a second surface side of an opposite side squarely facing the first surface of the substrate from the first surface thereof. The first surface imaging unit is arranged so as to photograph the first surface side inspection object area at a prescribed angle relative to the first surface of the substrate, and the second surface imaging unit is arranged so as to photograph the second surface side inspection object area at a prescribed angle relative to the second surface of the substrate. |
