| 摘要 |
PROBLEM TO BE SOLVED: To provide a breaking method and device capable of taking out a unit product of a substrate corner part at the time of pickup thereof without getting complicated with end materials.SOLUTION: A breaking method comprises: a first breaking step of setting up a first flat part 4a, an inclined part 4b and a second flat part 4c on a conveyance path 4 of a conveyor 3, conveying a substrate M along the conveyance path 4 and breaking a scribe line S1 in an X direction by flexure of the substrate M when the substrate M shifts from the first flat part 4a to the inclined part 4b or from the inclined part 4b to the second flat part 4c; a second breaking step of pressing and rolling a roller 7 along the vicinity of a scribe line S2 in a Y direction to break a scribe line in the Y direction; a third breaking step of breaking by a pressing member 11, both end material area portions P1 of the scribe line S1 in the X direction; and a pickup step of picking up a broken unit product M1' by an adsorption unit D. |
