| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz glass crucible for drawing up a single crystal silicon that effectively suppresses liquid surface vibration when drawing up a single crystal silicon, especially when drawing up one after plural pieces of single crystal silicon in multiple drawing.SOLUTION: A quartz glass crucible 11 for drawing up a single crystal silicon from silicon melt held inside is composed of a bottom part, a curved part, and a trunk part. The quart glass crucible 11 has an outer layer 13 made of opaque quartz glass containing air bubbles and an inner layer 12 made of transparent quartz glass containing substantially no air bubbles. Grooves 21 long in the vertical direction are formed on a part of the inner surface of the trunk part so as to contact the surface of the melt in the initial state of the silicon melt held in the crucible 11. Grooves 21 are not formed on the bottom part nor on the curved part. |
