发明名称 ELECTRICALLY CONDUCTIVE THIN FILMS AND PRODUCTION METHODS THEREOF
摘要 The present invention provides a method to manufacture a thin film containing Hf_3Te_2 comprising: a step of obtaining a raw material of a thin film containing Hf_3Te_2; a step of obtaining a crystalline material having a surface to form the thin film containing Hf_3Te_2; and a step of forming the thin film containing Hf_3Te_2 on the surface of the crystalline material from the raw material. During this time, the crystalline material has a crystal structure including a regular arrangement of composed atoms, a random polygon or polyhedron regularly repeated inside the regular arrangement being drawn, and a ratio of a minimum difference between a length of one side of the polygon or polyhedron and a lattice constant with respect to the lattice constant of Hf_3Te_2 being 5% or less.
申请公布号 KR20150136431(A) 申请公布日期 2015.12.07
申请号 KR20140064010 申请日期 2014.05.27
申请人 삼성전자주식회사;성균관대학교산학협력단 发明人 이기문;김은성;김성웅;손윤철;박희정;최재영;한인택
分类号 C23C14/06;C23C14/54;C23C16/30;C23C16/52 主分类号 C23C14/06
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