发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can inhibit poor embedment of a semiconductor chip caused by a flow of a resin which composes an encapsulation sheet.SOLUTION: A semiconductor device manufacturing method comprises: a process A of preparing a carrier with a chip; a process B of preparing a frame jig which can be arranged to surround a circumference of the carrier and has a thickness thinner than a total of a thickness of the carrier and a thickness of the chip; a process C of arranging the frame jig and the carrier with the chip which can be arranged to surround a circumference of the carrier with the frame jig; a process D of preparing an encapsulation sheet having a shape in plan view, which at least fits the carrier; a process E of arranging the encapsulation sheet on the semiconductor chip after the process C and the process D; and a process F of embedding the semiconductor chip in the encapsulation sheet to form an encapsulated body where the semiconductor chip is embedded in the encapsulation sheet.
申请公布号 JP2015220350(A) 申请公布日期 2015.12.07
申请号 JP20140103094 申请日期 2014.05.19
申请人 NITTO DENKO CORP 发明人 ISHII ATSUSHI;IINO CHIE;MORITA KOSUKE
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
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