| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer robot which shortens the tact time of the processing step and achieves space saving and cost reduction.SOLUTION: A transfer robot (51) includes: a transfer pad (53) which suctions and holds a plate-like workpiece (W) on a holding surface (56); an arm (52) which supports the transfer pad so that the transfer pad may move in a horizontal direction; and a workpiece cleaning mechanism (77) which cleans a lower surface (Wa) of the plate-like workpiece suctioned and held by the transfer pad. The transfer pad is moved close to the workpiece cleaning mechanism by the arm when the plate-like workpiece is transferred and the lower surface of the plate-like workpiece held by the transfer pad is cleaned by the workpiece cleaning mechanism. |
