| 摘要 |
PROBLEM TO BE SOLVED: To allow uniform stress to be applied over a necessary length of a light modulation area in light modulation devices displacing the beam structure to thereby apply the stress to a light modulator formed on a beam structure, and varying a modulation band of light.SOLUTION: A light modulation device comprises a movable structuring body 105 that is coupled to a stationary unit 103 by a coupling unit 104 to be spacedly arranged on a substrate 101, in which a light modulator 109 is arranged in the coupling unit 104. The stationary unit 103, the coupling unit 104 and the movable structuring body 105 are a so-called cantilever beam structure, and a part near a stationary end of the beam is of a constricting structure in a planar view. Further in the planar view, a width of the coupling unit 104 is formed to be wider as coming closer to the stationary unit 103, and further, in the planar view, a width of the coupling unit 104 on a stationary unit 103 side is formed to be smaller than that of the movable structuring body 105. |
