| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique that is advantageous to stable and high-precision movement of a blade used for light interception of exposure light.SOLUTION: A scan exposure type exposure device has a blade for intercepting at least a part of exposure light, a linear motor that constitutes a stator and a movable element holding a blade and moves the movable element relatively to the stator in a direction parallel to the gravitational force direction by using a magnet and a coil which confront each other in a direction vertical to the gravitational direction, and support means for supporting the stator so that the stator is moved in the direction opposite to the movement direction of the movable element according to the movement of the movable element. The support means has a first support part for supporting the stator in a contactless style and elastically, and a second support part that elastically supports the stator in contact with the stator. The second support part is configured to control the movement of the stator in the direction vertical to the gravitational force direction so that the confronting interval of the coil to the magnet is kept fixed. |
