| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required to exchange a process liquid.SOLUTION: A process liquid exchange method according to an embodiment in a liquid processing device includes a discharge step, a storage step, a filter cleaning step, and a replacement step. The liquid processing device comprises a storage tank which stores a process liquid, a circulation line which returns the process liquid supplied from the tank to the tank, a processing unit which processes a substrate using the process liquid supplied from the circulation line, and a filter which removes a foreign material from the process liquid flowing through the circulation line. The discharge step discharges the process liquid from the tank. The storage step stores a new process liquid in the tank. The filter cleaning step blocks the upstream and downstream sides of the filter in the circulation line, supplies a cleaning liquid to the blocked section of the circulation line, and cleans the filter. The replacement step supplies a process liquid to the blocked section and replaces a remaining cleaning liquid with a process liquid after the filter cleaning step. |
