MANUFACTURING APPARATUS AND METHOD FOR QUANTUM DOT ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a quantum dot array manufacturing apparatus and method that can stably form quantum dots each having a desired diameter at desired intervals.SOLUTION: An apparatus for manufacturing a quantum dot array containing a quantum dot layer in which plural quantum dots are arranged has: storage means 101 for storing a predetermined relational expression; acquiring means 102 for acquiring the diameter and interval of the quantum dots in the quantum dot layer; calculating means 103 for calculating the composition of silicon compound film and the condition of a thermal treatment from the diameter and interval acquired by the acquiring means 102 on the basis of the relational expression; a plasma chemical vapor growth device 104 for forming the silicon compound film having the composition calculated by the calculating means 103 so that the silicon compound film has a thickness equal to the diameter acquired by the acquiring means 102; and a thermal treatment device 105 for performing a thermal treatment on the silicon compound film formed by the plasm chemical vapor growth device 104 under the thermal treatment condition calculated by the calculating means 103.