AIN SINTERED BODY, AIN SUBSTRATE AND METHOD OF PRODUCING AIN SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an AlN sintered body having low surface roughness and an AlN substrate having excellent heat transfer efficiency.SOLUTION: The AlN sintered body comprises an AlN crystal grain, and a grain boundary phase. The Vickers hardness of the grain boundary phase is lower than that of the AlN crystal grain.