| 摘要 |
<p>The sensor (10) has a seismic plate (11) suspended over a torsion bar (12) for measuring physical quantity i.e. z-acceleration on the seismic plate, where an amount of change in electrical resistance of the torsion bar represents the quantity to be measured. Two cantilever beams (14) are arranged such that the beams are tightened or stretched by movement of the seismic plate, where the cantilever beams are arranged in a direction perpendicular to the direction of torsion. An independent claim is also included for a method for measuring inertial size or force by the micromechanical sensor.</p> |
