| 摘要 |
PROBLEM TO BE SOLVED: To reduce fear of damaging a glass measurement table and reduce deformation of an inspection object in an inspection.SOLUTION: An inspection table comprises a plurality of placement mechanisms 10 on which flat plate-like inspection objects are placed, the placement mechanisms 10 being arranged on a plate-like member 6. Each of the placement mechanisms comprises: a placement part 22 on which a metal mask is placed; a first pedestal part 18 that supports the placement part and has a first curved surface 18b of a predetermined curvature on a side of the plate-like member; and a second pedestal part 16 that supports the first pedestal part and has a second curved surface 16d of a curvature that corresponds to the predetermined curvature on a side of the first pedestal part, the second pedestal part 16 being movable in a normal direction of the plate-like member. The second pedestal part supports the first pedestal part so as to be oscillatable due to the first curved surface sliding on the second curved surface. |
