Provided is a pellicle mounting device comprising a bonding unit that includes the following: a bonding chamber for bonding an original plate which has a light irradiation surface onto which exposure light is radiated, and a pellicle which includes a pellicle film and a pellicle frame having grooves that support the pellicle film on one end surface side in the thickness direction and that are provided on the other end surface side in the thickness direction, and includes through holes that penetrate between an outer circumferential surface and a wall surface of the grooves; and an evacuation tube that, in a state where the pellicle and the original plate are disposed in the bonding chamber so that the other end surface of the pellicle frame and the light irradiation surface face each other, evacuates the interior of the grooves through the through holes of the pellicle frame.
