摘要 |
<p>A method for performing an X-ray diffraction analysis of a crystal sample (112) using a two-dimensional detector (114) that integrates an X-ray diffraction signal while the position of the sample (112) relative to an X-ray source (102) is changed along a scan direction, such as a rocking scanning curve. The resulting image is compressed along the scan direction, but may be collected very quickly. The capture of both on-axis and off-axis reflections in a single image provides a common spatial frame of reference for comparing the reflections. This may be used in the construction of a reciprocal space map, and is useful for analyzing a sample with multiple crystal layers, such as a crystal substrate with a crystalline film deposited thereupon.</p> |