发明名称 TOP PLATE OPENING/CLOSING MECHANISM AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a top plate opening/closing mechanism capable of horizontally raising a top plate.SOLUTION: A top plate opening/closing mechanism for opening and closing a top plate of a container 10 composed of a container body 11 and a rigid top plate 12, includes three jacks 101a-101c, the top plate 12 is lifted up from the container body 11 by three supporting points so that the top plate 12 is raised. The top plate 12 has the line-symmetric shape with respect to a virtual line L, and two supporting points sa and sc among supporting points sa-sc of three jacks 101a-101c, have line-symmetric positional relationship with respect to the virtual line L. A load by gravitational force of the top plate 12 is uniformly applied to three jacks 101a-101c, and the jacks 101a-101c support the top plate 12 and extend, so that the top plate 12 is raised while keeping a horizontal state.
申请公布号 JP2015215041(A) 申请公布日期 2015.12.03
申请号 JP20140097911 申请日期 2014.05.09
申请人 EBARA CORP 发明人 MIYAMOTO MATSUTARO
分类号 F16J13/22;H01L21/677 主分类号 F16J13/22
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