PHYSICAL UNCLONABLE INTERCONNECT FUNCTION ARRAY

摘要

A method for fabricating an interconnect function array includes forming a first plurality of conductive lines on a substrate, forming an insulator layer over the first plurality of conductive lines and the substrate, removing portions of the insulator layer to define cavities in the insulator layer that expose portions of the substrate and the first plurality of conductive lines, wherein the removal of the portions of the insulator layer results in a substantially random arrangement of cavities exposing portions of the substrate and the first plurality of conductive lines, depositing a conductive material in the cavities, and forming a second plurality of conductive lines on portions of the conductive material in the cavities and the insulator layer.

主权项

1. An interconnect array comprising:
a first plurality of conductive lines arranged in a substrate; an insulator layer disposed on the first plurality of conductive lines; a second plurality of conductive lines arranged in the insulator layer, wherein portions of the second plurality of conductive lines overlap portions of the first plurality of conductive lines; and a plurality of vias defined by the insulator layer, the plurality of vias arranged in a random pattern.