THIN FILM INTERCONNECTS WITH LARGE GRAINS

摘要

The present disclosure relates to integrated circuits and to methods of manufacturing interconnects of integrated circuits. For example, an integrated circuit includes a surface of the integrated circuit and an interconnect formed on the surface and comprising a metal. An average grain size of the metal of the interconnect is greater than or equal to at least half of a line width of the interconnect. In another example, a method for manufacturing an interconnect of an integrated circuit includes depositing a layer of a metal onto a surface of the integrated circuit, annealing the metal, patterning a first hard mask for placement over the metal and forming a line of the interconnect and a first via of the interconnect by performing a timed etch of the metal using the first hard mask.

主权项

1. An integrated circuit, comprising:
a surface of the integrated circuit; and an interconnect formed on the surface and comprising a metal, wherein an average grain size of the metal of the interconnect is greater than or equal to at least half of a line width of the interconnect.