ROTATING DISK CARRIER WITH PBN HEATER

摘要

Various embodiments provide a substrate carrier configured to rotatably carry at least one substrate through a plurality of processing stations. The substrate carrier includes an integrated heater for heating a first side of the substrate while the second side of the substrate undergoes one or more manufacturing processes at each of the plurality of processing stations, e.g., to promote the desired growth of HAMR media. This can result in the elimination of one or more processing stations, thereby realizing cost savings, decreased substrate processing time, as well as a reduced area within which a substrate processing system can be implemented.

主权项

1. A disk carrier, comprising:
a receptacle for rotatably carrying a disk through at least one processing station; a heater integrated into the disk carrier and disposed proximate to a first side of the disk for heating the disk while the disk is rotating in the receptacle and undergoing at least one manufacturing process in the at least one processing station; and a controller for controlling operation of the heater.