发明名称 SYSTEMS AND METHODS FOR CONTROLLING WAFER-BREAKER DEVICES
摘要 Systems and methods for controlling wafer-breaker devices. In some embodiments, a controller for a semiconductor wafer singulation apparatus can be configured to receive an input signal having information about at least one singulation parameter. The controller can be further configured to generate an output signal based on the input signal to effectuate an operation associated with the singulation parameter. The controller can be further configured to disable manual control of the singulation parameter. In some embodiments, such a controller can be implemented, for example, in a control module, in a kit for modifying an existing singulation apparatus, as an integral part of a singulation apparatus, or any combination thereof.
申请公布号 US2015346712(A1) 申请公布日期 2015.12.03
申请号 US201414291397 申请日期 2014.05.30
申请人 SKYWORKS SOLUTIONS, INC. 发明人 LARA Cesar D.
分类号 G05B19/418;H01L21/67 主分类号 G05B19/418
代理机构 代理人
主权项 1. A controller for a semiconductor wafer singulation apparatus, the controller comprising a processor configured to: receive an input signal having information about at least one singulation parameter; generate an output signal based on the input signal to effectuate an operation associated with the singulation parameter; and disable manual control of the singulation parameter.
地址 Woburn MA US