发明名称 METHOD FOR SPLITTING BRITTLE SUBSTRATE
摘要 A cutting edge (51) is slid across the surface (SF1) of a brittle substrate (4) so as to cause plastic deformation and form a trench line (TL). The step in which said trench line (TL) is formed is performed in such a manner so as to produce a crack-free state in which, directly underneath the trench line (TL), the brittle substrate (4) is connected in a continuous fashion in a direction that intersects the trench line (TL). Next, a film (21) that at least partially covers the trench line (TL) is formed on the surface (SF1) of the brittle substrate (4), and a crack is then made to extend along the trench line (TL), forming a crack line (CL).
申请公布号 WO2015182297(A1) 申请公布日期 2015.12.03
申请号 WO2015JP62200 申请日期 2015.04.22
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. 发明人 SOYAMA HIROSHI
分类号 C03B33/037;B28D5/00 主分类号 C03B33/037
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