发明名称 STAGE SYSTEM, POWER SUPPLY METHOD, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
摘要 PROBLEM TO BE SOLVED: To provide a stage system in which regeneration power can be reused more effectively than a case where only the regeneration power stored once, out of the power obtained by regenerative brake, is used.SOLUTION: A stage system 100 has a plurality of stages 2A, 2B, 2C, and a supply source 23 for supplying the regeneration power, recovered in the deceleration section of one stage out of the plurality of stages 2A, 2B, 2C, to other stage. The supply source 23 supplies the regeneration power not through storage means, in at least one of the acceleration section and constant speed section of a stage to which the regeneration power is supplied.
申请公布号 JP2015216330(A) 申请公布日期 2015.12.03
申请号 JP20140099897 申请日期 2014.05.13
申请人 CANON INC 发明人 ITO JUN
分类号 H01L21/027;G03F7/20;H01L21/68 主分类号 H01L21/027
代理机构 代理人
主权项
地址