发明名称 BASE FILM FOR DICING FILMS, AND DICING FILM
摘要 PROBLEM TO BE SOLVED: To provide a base film for dicing films and a dicing film, which are superior in expandability and restorability, and which bring about the effect of suppressing the production of dicing dust in dicing at a high level.SOLUTION: A base film for dicing films comprises: a base layer; and a surface layer disposed on one principal surface of the base layer. The surface layer has a 10%-modulus of 10-18 MPa, which has been measured based on a test method according to JISK6734. The surface layer preferably includes a polystyrene-based resin, and a vinyl aromatic hydrocarbon-conjugated diene hydrocarbon copolymer or a hydrogenated product thereof.
申请公布号 JP2015216320(A) 申请公布日期 2015.12.03
申请号 JP20140099709 申请日期 2014.05.13
申请人 SUMITOMO BAKELITE CO LTD 发明人 NAGAO YOSHINORI
分类号 H01L21/301;B24B27/06 主分类号 H01L21/301
代理机构 代理人
主权项
地址