| 发明名称 |
MEMS DRIVING DEVICE, ELECTRONIC APPARATUS, AND MEMS DRIVING METHOD |
| 摘要 |
A spectroscopic measurement apparatus includes a fixed substrate, a movable substrate, and a wavelength variable interference filter which includes an electrostatic actuator for changing the gap dimension between the substrates, a vibration disturbance detection unit which detects vibration added to the wavelength variable interference filter, and a bias driving unit which applies a feed-forward voltage based on a detected value of the vibration disturbance detection unit to the electrostatic actuator. |
| 申请公布号 |
US2015346479(A1) |
申请公布日期 |
2015.12.03 |
| 申请号 |
US201514721175 |
申请日期 |
2015.05.26 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
HIROKUBO Nozomu |
| 分类号 |
G02B26/00;G01J3/26;B81B5/00;B81B7/00;B81B7/02 |
主分类号 |
G02B26/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An MEMS driving device comprising:
an MEMS element that includes a pair of substrates and an electrostatic actuator which changes a gap dimension between the pair of substrates; a vibration detection unit that detects vibration which is added to the MEMS element; and an actuator control unit that applies a feed-forward voltage based on a detected value of the vibration detection unit to the electrostatic actuator. |
| 地址 |
Tokyo JP |
