发明名称 |
METHOD OF MANUFACTURING AN INKJET HEAD |
摘要 |
A method of manufacturing an inkjet head includes: forming an annular groove on a first surface of a substrate made of a first material; forming a side wall by filling a second material in the annular groove and forming a nozzle plate by forming a thin film made of the second material on the first surface of the substrate; forming a ring-shaped piezoelectric element on the nozzle plate surrounded by the side wall, the piezoelectric element comprising a lower electrode, a piezoelectric film, and an upper electrode; forming a ink chamber disposed over an area of a lower surface of the nozzle plate that is surrounded by the side wall from a second surface opposite the first surface of the substrate, the ink chamber being formed by a single dry etching process; and forming a nozzle to the nozzle plate positioned inside of the annular piezoelectric element. |
申请公布号 |
US2015343783(A1) |
申请公布日期 |
2015.12.03 |
申请号 |
US201514822398 |
申请日期 |
2015.08.10 |
申请人 |
KABUSHIKI KAISHA TOSHIBA ;TOSHIBA TEC KABUSHIKI KAISHA |
发明人 |
KAWAKUBO Takashi;ABE Kazuhide;TOMIZAWA Yasushi;ARAI Ryuichi;KUSUNOKI Ryutaro;TAKAGI Osamu |
分类号 |
B41J2/16 |
主分类号 |
B41J2/16 |
代理机构 |
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代理人 |
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主权项 |
1. A method of manufacturing an inkjet head comprising:
forming an annular groove on a first surface of a substrate made of a first material; forming a side wall by filling a second material in the annular groove and forming a nozzle plate by forming a thin film made of the second material on the first surface of the substrate; forming a ring-shaped piezoelectric element on the nozzle plate surrounded by the side wall, the piezoelectric element comprising a lower electrode, a piezoelectric film, and an upper electrode; forming a ink chamber disposed over an area of a lower surface of the nozzle plate that is surrounded by the side wall from a second surface opposite the first surface of the substrate, the ink chamber being formed by a single dry etching process; and forming a nozzle to the nozzle plate positioned inside of the annular piezoelectric element. |
地址 |
Tokyo JP |