发明名称 |
ELECTRONIC PART, ELECTRONIC APPARATUS, AND MOVING OBJECT |
摘要 |
An electronic part includes a bottom portion of a cavity that has an oscillation device, a ceiling portion so disposed that it faces the bottom portion via the cavity and having holes, a shielding portion that is disposed in the cavity and between the bottom portion of the cavity and the ceiling portion and covers the holes in a plan view viewed in the direction in which the bottom portion of the cavity and the ceiling portion are arranged, and sealing portions that are connected to both the ceiling portion and the shielding portion via the holes and seal the holes. |
申请公布号 |
US2015344301(A1) |
申请公布日期 |
2015.12.03 |
申请号 |
US201514722417 |
申请日期 |
2015.05.27 |
申请人 |
Seiko Epson Corporation |
发明人 |
KINUGAWA Takuya |
分类号 |
B81C1/00;B81B3/00 |
主分类号 |
B81C1/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. An electronic part comprising:
a bottom portion that has a functional portion; a ceiling portion that is disposed in a position separate from the bottom portion via a cavity and has holes; a shielding portion that is disposed between the bottom portion and the ceiling portion in the cavity and covers the holes in a plan view viewed in a direction in which the bottom portion and the ceiling portion are arranged; and sealing portions that are connected to both the ceiling portion and the shielding portion and seal the holes. |
地址 |
Tokyo JP |