发明名称 PRECISE ANNEALING OF FOCAL PLANE ARRAYS FOR OPTICAL DETECTION
摘要 Precise annealing of identified defective regions of a Focal Plane Array (“FPA”) (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditions, such as under cryogenic temperatures, such that performance of an FPA can be evaluated before, during, and after annealing without requiring thermal cycling.
申请公布号 US2015348853(A1) 申请公布日期 2015.12.03
申请号 US201514824621 申请日期 2015.08.12
申请人 Sandia Corporation 发明人 Bender Daniel A.
分类号 H01L21/66;B23K26/00 主分类号 H01L21/66
代理机构 代理人
主权项 1. A system comprising: a device configured to mount and position a Focal Plane Array (“FPA”) that comprises an identified defective region, the defective region corresponding to at least one defective pixel, the defective region being less than an entirety of the FPA; and an emitter that irradiates the defective region of the FPA to anneal the defective region without annealing a non-defective region of the FPA.
地址 Albuquerque NM US